ZYGO ZMI2002
Product name: **ZYGO ZMI2002 module
** Product Description: **ZYGO ZMI2002 module is an optical module for measuring surface contours, manufactured by ZYGO Corporation of the United States. It uses interferometric technology to measure surface profiles of various shapes and sizes, with high precision and high resolution.
Product parameters:
Model: ZMI2002
Measuring range: 0.01μm ~ 100μm
Resolution: 0.001μm
Repeatability: 0.002μm
Measurement speed: 1000 lines/second
Operating temperature: 10℃ ~ 40℃
Specifications:
Input: Light source, mirror, reference mirror
Output: Data interface
Application field:
ZYGO ZMI2002 modules are suitable for a variety of applications, including:
Semiconductor manufacturing
Optical fabrication
aerospace
