The AMAT 0140-76018 module is a sputtering module for semiconductor manufacturing. It is manufactured by Applied Materials in the United States and is suitable for a variety of semiconductor processes, including wafer fabrication, thin film deposition, lithography and more.

Product name: AMAT 0140-76018 Sputtering module

Product Description:

AMAT 0140-76018 Sputtering module is a high performance and high reliability sputtering module. It uses advanced sputtering technology and has the following features:

Sputtering rate is high, up to 100 nm/s

The sputtering uniformity is good, up to ± 1%
Sputtering accuracy is high, up to ± 0.1 nm
Product parameters:

Sputtering rate: 100 nm/s
Sputtering uniformity: ± 1%
Sputtering accuracy: ± 0.1nm
Sputtering target material: gold, silver, copper, aluminum, silicon, etc
Sputtering gas: argon, nitrogen, oxygen, etc
Specifications:

Size: 100mm x 100mm x 100mm
Weight: 5 kg
Power supply: 220V/50Hz