ZYGO 8070-0279-01
Product Name
ZYGO 8070-0279-01 Laser Interferometer Measurement Module (serves as a “high-precision optical sensor core” in metrology systems, specializing in nanoscale displacement, surface profile, and flatness measurements. With advanced laser interferometry technology and ultra-stable optical components, it delivers accurate data for precision manufacturing, semiconductor inspection, and aerospace component testing)
Product Description
The ZYGO 8070-0279-01 is a specialized laser interferometer module designed for high-precision optical measurement applications, widely used in semiconductor wafer inspection, precision optics manufacturing, and aerospace component metrology. In semiconductor fabs, this module integrates into wafer surface profilers to measure nanoscale topography variations (down to 0.1nm resolution) across 300mm wafers. By analyzing interference patterns generated by a 633nm helium-neon laser, it maps surface roughness (Ra) and flatness deviations, ensuring wafer substrates meet strict fabrication standards (total thickness variation ≤2μm for advanced nodes).
In precision optics production, such as manufacturing lenses for medical imaging systems, the module verifies surface form accuracy with a measurement repeatability of ±0.5nm over a 100mm aperture. Its built-in environmental compensation sensors (temperature, pressure, humidity) automatically correct for air refractive index variations, maintaining measurement accuracy even in unstable factory conditions (environmental-induced error ≤0.1ppm). The module features a compact design that integrates seamlessly with automated measurement systems, supporting high-speed data acquisition (10,000 points/second) for inline quality control. Additionally, its digital signal processing algorithm filters out vibration noise (up to 10Hz), making it suitable for shop-floor environments without specialized vibration isolation.
Product Parameters
- Optical Parameters:
- Laser Source: 633nm helium-neon laser, output power 0.5mW (Class II)
- Measurement Range: 0-100mm (displacement), 0-300mm (surface profile)
- Resolution: 0.1nm (displacement), 0.5nm (surface rough