ZYGO 7702 BH5-6314

The ZYGO 7702 BH5-6314 is an optical phase meter module for measuring surface topography. It has the following characteristics:

High accuracy: 0.1 nm
High resolution: 1 micron
Large measuring range: 100 mm
Non-contact measurement

Rapid measurement

Compatible with a wide range of optical microscopes
The module can be used for a variety of applications, including:

Semiconductor manufacturing
Optical component manufacturing
Precision machining
Scientific research
Product parameter
Parameter value
Model 7702 BH5-6314
Accuracy 0.1nm
Resolution 1 micron
Measuring range 100 mm
Measurement mode Phase measurement, interferometry
Light source 532 nm laser
Detector CCD
Interface USB
Power supply 12VDC