MKS RPS AX7695
The MKS RPS AX7695 module is an RF power module for plasma sources produced by MKS, which provides high frequency and high voltage power for plasma sources. The module has the characteristics of high efficiency, high stability, easy to use, etc., and is suitable for various plasma applications.
Product parameters:
Output power: 1350W
Output frequency: 13.56MHz
Output voltage: 0-1000V
Output current: 0-1.35A
Efficiency: >90%
Stability: <±0.5%
Interface: RS-232, USB
Power supply voltage: 220VAC
Power consumption: 1500W
Operating temperature: 0°C to +50°C
Storage temperature: -20°C to +70°C
Dimensions: 483 x 216 x 89 mm
Weight: 5.4kg
Specifications:
Case: Aluminum alloy
Cooling method: air cooling
Protection function: over voltage, over current, over heat, short circuit
Applications:
Plasma etching
Plasma cleaning
Plasma coating
Plasma enhanced chemical Vapor Deposition (PECVD)
