MKS AX8410-28HC

The MKS AX8410-28HC is a high-concentration, high-flow ozone generator manufactured by MKS Instruments. It converts oxygen into ozone by means of electrostatic discharge, and is widely used in semiconductor manufacturing, water treatment and other fields, for surface treatment, disinfection and sterilization.

Product name

English: MKS AX8410-28HC High concentration high flow ozone generato

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MKS AX8410-28HC High Concentration, High Flow Ozone Generator
Product description
The X8410-28HC module is usually integrated in a variety of equipment, such as plasma cleaning equipment, ozone water generators, etc. It produces a high concentration of ozone and provides a steady flow rate to meet the needs of different applications.

Main features and advantages
High concentration output: can produce high concentration of ozone, improve the treatment efficiency.
High traffic: Provides stable high traffic output to meet large traffic requirements.
Good stability: It has good stability and stable output concentration.
Flexible control: Provide a variety of control interfaces, convenient for users to set and control.
Long life: Use corrosion-resistant materials to extend service life.
Product parameters (part)
Maximum ozone concentration: 400 g/Nm³
Maximum traffic: 80 slm
Power requirements: Depends on the model
Control interface: analog, digital, RS-232, etc
Operating temperature: 5°C to 40°C
Application field
Semiconductor manufacturing: wafer surface cleaning, removal of organic matter
Water treatment: Water disinfection, odor removal
Medical devices: Disinfection of equipment surfaces
Food industry: Surface disinfection of food packaging materials