ENI GMW-25Z
The ENI GW-25Z module is a high power RF generator for industrial applications such as plasma etching, chemical vapor deposition (CVD) and sputtering. It can provide high-power, stable, adjustable RF energy for excitation and maintenance of plasma, so as to achieve material etching, deposition and other processing.
Product description
The GW-25Z module is designed to be robust and reliable. It is capable of stable operation in harsh industrial environments and provides precise power control. This module is usually integrated into semiconductor manufacturing, solar cell manufacturing and other equipment, as a core component to provide RF energy.
Main parameters and specifications
Model: GW-25Z
Type: Radio frequency generator
Frequency range: 1.8MHz-2.17MHz
Output power: 2500W
Load impedance: 50Ω
Cooling method: forced air cooling
Control mode: remote control, panel control
Product characteristics
High power: Provides up to 2500W RF output power.
Adjustable frequency: Wide frequency range, can adapt to different application requirements.
High stability: good power stability and frequency stability.
High reliability: Rugged design for industrial environments.
