1C31223G01 WESTINGHOUSE

Novellus 02-103960-00 Controller Platform P166/64

COMDEL CLX-1250 RF Generator 1.75-2.15 MHz

Novellus Match 02-282128-00, used

ACL C13170 1.25kW Microwave power source

Novellus System 02-321899-00 REV.A Module controller

MKS ENI GMW-50 RF Generator, untested

Novellus 02-103970-00 ASSY,MOD CONT,P166/64 controller

BOC EDWARDS QDP 40 vacuum pump with Silencer, untested

BOC EDWARDS QDP 40 vacuum pump with Silencer, untested

BOC EDWARDS QDP 40 vacuum pump with Silencer, untested

BOC EDWARDS QDP 40 vacuum pump with Silencer, untested

ENI DPGS-10 DC Generator, AMAT 0190-36274, OEM BOX

7 STEC MFC SEC-4400M, O2, SiH4, Ar, BCl3, Cl2, used

Thermo Neslab M25 chiller, used, as is

Novellus 02-105005-00 ASSY,MC,P166,W/​8 RS232 controller

EDWARDS DP80 Dry Vacuum Pump, used, as is

ENI OEM-25A-21091-5​1 RF Generator, 2500 W, 13.56 MHz,

RFPP RF Generator ICP-20P Model# 8511139050, 2000 W

Advanced Energy PDW 600, AE 3156014 Lam # 853-15516-003

ENI OEM-12B-07 RF Generator, 1200W at 13.56 MHz

Lot of 6 MFC, UNIT UFC-1660, N2, Cl2, He Unit MFC

Lot of 6 MFC, UNIT UFC-1660, O2, Cl2, Unit MFC

ENI OEM-12B-02 RF Generator, 1250W at 13.56 MHz, used

ENI OEM-12B-02 RF Generator, 1250W at 13.56 MHz, used

ENI GHW-12Z Genesis RF Generator 1250W, AMAT 0190-09832

ROLLER BRUSH CELL HDSIOC NOVELLUS 02-336512-00 REV. 1

HDSIOC ROLLER BRUSH NOVELLUS 02-308058-00 VERSION 4.72

XCEDA FAC HDSIOC NOVELLUS 02-309772-00 VERSION 4.72

ISOC HI-LO TRANSFER NOVELLUS 02-131736-00 REV. A

PDL OXIDE HDSIOC 3 NOVELLUS 02-273741-00 VERSION 4.72