Product Overview
The MKS 902-1112 is a Series 902 absolute piezo transducer from MKS Instruments, designed for precise, gas-independent vacuum pressure measurement in demanding industrial and scientific applications. The MKS 902-1112 integrates a MEMS-based piezo resistive sensor with advanced electronics in a compact, single-unit package, delivering fast, accurate, and repeatable pressure readings that shorten process cycles and improve system throughput. As part of the widely deployed 902 Series, the MKS 902-1112 serves as an economical yet high-performance solution for absolute pressure measurement across a 1 to 1,000 Torr full-scale range.
The MKS 902-1112 employs a silicon piezo resistive sensor that measures absolute vacuum pressure with an accuracy of less than 1% of reading, while remaining completely independent of gas type—a critical advantage in processes where gas composition varies or is unknown. The transducer features a robust stainless steel construction with an NW 16 KF connection, making it suitable for direct integration into vacuum systems without additional adaptation. The MKS 902-1112 supports multiple communication and output options including RS485 and RS232 digital interfaces alongside analog output, enabling flexible integration with controllers, PLCs, and data acquisition systems.
The MKS 902-1112 belongs to the Series 902 transducer line, a platform recognized for combining MEMS piezo sensor technology with integrated electronics to reduce space requirements and simplify installation. With an operating temperature range suitable for industrial environments and a compact form factor measuring approximately 4 × 4 × 6.3 cm and weighing just 0.1 kg, the MKS 902-1112 delivers reliable performance in space-constrained systems while maintaining the durability required for semiconductor manufacturing, thin film coatings, freeze-drying, analytical instruments, medical devices, and aerospace applications.
Technical Specifications
| Parameter Name | Parameter Value |
|---|---|
| Product Model | 902-1112 |
| Manufacturer | MKS Instruments |
| Product Type | Absolute Piezo Vacuum Transducer |
| Product Series | Series 902 |
| Measurement Range | 1 to 1,000 Torr (Full Scale) |
| Sensor Technology | MEMS-Based Piezo Resistive |
| Accuracy | < 1% of Reading (10-1000 Torr) |
| Resolution | 1 × 10⁻⁴ of Full Scale |
| Gas Dependency | Gas Independent |
| Fitting Type | NW 16 KF |
| Communication Interfaces | RS485, RS232, Analog |
| Set Point Range | 1 to 1,000 Torr |
| Operating Temperature | 0°C to 50°C (32°F to 122°F) |
| Maximum Bakeout Temperature | 85°C (185°F), Non-Operating |
| Dimensions | Approx. 4 × 4 × 6.3 cm |
| Weight | 0.1 kg |
| Construction | Stainless Steel |
| Country of Origin | Germany |