810-800082-043

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810-800082-043

810 – 800082 – 043 High – Precision Semiconductor Processing Module (manufactured by Lam Research)

II. Product Description

The 810 – 800082 – 043 is a high – precision module engineered for semiconductor manufacturing applications. It plays a crucial role in critical processes such as etching and deposition within semiconductor fabrication facilities.

810-800082-043

This module is designed to ensure optimal performance and reliability. It features advanced technologies that allow for precise control over semiconductor processing steps. With its high – precision capabilities, it contributes to higher yields and better – quality semiconductor products.

 

The 810 – 800082 – 043 is equipped to interface with various semiconductor equipment, enabling seamless integration into existing production lines. Its robust construction ensures long – term durability, even in the demanding environments of semiconductor manufacturing plants. Additionally, it has built – in diagnostic functions that continuously monitor its operation, helping to detect and address potential issues promptly, thus minimizing system downtime.

III. Product Parameters

(I) Electrical Parameters

  1. Operating Voltage: 24V DC (Some sources also mention an option of 220V AC, but 24V DC seems more common for this module)
  2. Output Current: 2A
  3. Input Voltage Range: If considering the 24V DC option, it may have a tolerance, for example, ±10% (i.e., 21.6V – 26.4V DC)
  4. Output Voltage Range: Some applications might require an output voltage range such as 0 – 10V DC for process control
  5. Power Consumption: Precise power consumption details are not always readily available in the given sources. But considering its function and the electrical parameters, it might consume around [X] watts during normal operation.
  6. Isolation Voltage: To protect against electrical interference and ensure signal integrity, it likely has an isolation voltage, for example, [Y] Vrms between different electrical sections.

(II) Performance – related Parameters

  1. Frequency Range: Up to 10 kHz (Some sources suggest a wider range like 10 – 100 kHz)
  2. Precision Tolerance: It boasts a high – precision tolerance, for example, ±0.01 microns, which is essential for semiconductor processing applications where accuracy at the micro – level is critical.
  3. Response Time: The frequency response up to a certain value (e.g., 1 kHz as per some descriptions) indicates its ability to respond quickly to changing process requirements. This quick response time is crucial for maintaining tight control over semiconductor processes.

(III) Environmental Parameters

  1. Operating Temperature: – 20°C to + 85°C
  2. Storage Temperature: – 40°C to 85°C
  3. Relative Humidity: Although not always explicitly stated in all sources, for an industrial – grade module like this, it can likely operate in a relative humidity range of 5% – 95% (non – condensing)
  4. Vibration and Shock Resistance: Since it is used in industrial settings, it is likely to comply with standards such as IEC 60068 – 2 – 6 for vibration resistance and IEC 60068 – 2 – 27 for shock resistance, ensuring stable operation in environments with mechanical vibrations and sudden shocks.
  5. Protection Rating: Some sources mention an IP67 rating, which provides protection against dust ingress and water immersion, ensuring operational integrity in harsh environments.

IV. Product Specifications

(I) Physical Specifications

  1. Dimensions: Different sources report slightly different values. One set of dimensions is 15 x 10 x 5 cm, while others might report something like 200 mm x 150 mm x 50 mm. These sizes are designed to fit into the standard equipment racks or enclosures used in semiconductor manufacturing facilities.
  2. Weight: Approximately 1.2 kg or 1.5 kg depending on the source. The relatively lightweight design makes it easier to handle during installation and maintenance procedures.
  3. Mounting: While not always clearly specified, it is likely designed for standard mounting methods such as being screwed or clipped into place within the semiconductor processing equipment.

(II) Certification Standards

  1. CE Certification: It meets the CE certification, which indicates compliance with European safety, health, and environmental protection standards.
  2. RoHS Compliance: The module is RoHS compliant, meaning it restricts the use of hazardous substances, contributing to environmental protection.

(III) Other Specifications

  1. Module Type: It is a precision – type semiconductor processing module.
  2. Compatibility: It is compatible with various semiconductor equipment, allowing for seamless integration into different semiconductor manufacturing setups.
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