ZYGO 4104C

ZYGO 4104C is a measurement electronic module for high-precision displacement measurement interferometers. It is part of ZYGO’s ZMI™ family and is specifically designed for the high-precision measurement of tiny displacements in a variety of precision measurement applications. This module is usually used in conjunction with ZYGO’s laser interferometer to form a complete measurement system.

Product name resolution

ZYGO: Company name, the world’s leading manufacturer of optical measurement equipment.
4104C: Product model, which indicates that the module belongs to the 4100 series. C may represent a specific configuration or version.
Product characteristics
High resolution: The ability to measure tiny displacements at the sub-nanometer level with extremely high

accuracy.
High-speed measurement: Support high-speed dynamic measurement, suitable for high-speed moving parts measurement.
Multi-axis measurement: Multiple measuring axes can be extended to measure displacement in multiple directions at the same time.
Cyclic error compensation: can automatically compensate the inherent nonlinear error of the system, improve the measurement accuracy.
Modular design: Easy to integrate into various measurement systems.
Product parameters (typical values)
Parameter 4104C
Number of shafts/plates 1 or 2
The board type is 6U VME
Minimum optical power 1.0µW
Position resolution 0.15 nm
Maximum speed ± 2.55m /s